R41 refrigerant (monofluoromethane, fluoromethane, methyl fluoride, Freon 41, HFC-41) is a raw material for the production of fluorobromomethane.
High-purity HFC-41 gas is a green and efficient new etching gas that can selectively etch thin films of silicon compounds and is often used in the etching process of semiconductor and electronic products.
R41 Refrigerant Parameters
High-purity HFC-41 gas is a green and efficient new etching gas that can selectively etch thin films of silicon compounds and is often used in the etching process of semiconductor and electronic products.
R41 Refrigerant Parameters
| Name: fluoromethane; methyl fluoride, monofluoromethane R41,HFC-41, F-41 | English full name: fluoromethane |
| Chemical formula: CH3F | Molecular weight: 34 |
| Molar mass: 34g/mol | Triple point temperature: -143.33℃ |
| Standard boiling point: -78.31℃ | Critical boiling temperature: 44.13℃ |
| Critical pressure: 5.897MPa (absolute pressure) | Critical density: 316.5kg/m3 |
| Freezing point: -142℃ | CAS Number: 593-53-3 |
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