carbon tetrafluoride

Carbon tetrafluoride (tetrafluoromethane, perfluorocarbon, PFC-14,R14The English name is Carbon Tetrafluoromethane. Carbon tetrafluoride belongs to the fc class substance, which does not damage the ozone layer but has a greenhouse effect; carbon tetrafluoride is a colorless, odorless, odorless, non-combustible and easily compressible gas. Slightly soluble in water. It is highly volatile and is one of the most stable organic compounds. At 900 degrees Celsius, it does not react with steel, nickel, tungsten, and molybdenum. It only decomposes slowly at carbon arc temperature. It is very stable to heat and has chemical properties than carbon tetrachloride. Inactive.

Carbon tetrafluoride (CF4) is currently the largest plasma etching gas in the microelectronic industry. It is widely used in etching thin film materials such as silicon, silicon dioxide, silicon nitride, phosphosilicate glass and tungsten. It is used in surface cleaning of electronic devices, There are also a large number of applications in the production of solar cells, laser technology, cryogenic refrigeration, gas insulation, leak detectors, control of the attitude of space rockets, detergents, lubricants and brake fluids in printed circuit production. Due to its strong chemical stability, CF4 can also be used in metal smelting and plastics industries.

The characteristics and development trends of electronic gases used in today's ultra-large-scale integrated circuits are ultra-pure, ultra-clean, multi-variety and multi-scale. In order to promote the development of their own microelectronic industries, countries have paid more and more attention to the development of special electronic gases production technologies. For now, CF4 has long occupied the etching gas market with its relatively low price, so it has broad development potential.

Packaging specification: 30Kg, 320kg 

Carbon tetrafluoride parameters