R116 refrigerant (hexafluoroethane, perfluoroethane, C2F6) can be used in a multifunctional etching technology commonly used in semiconductor production. It can be used for selective etching of metal silicides and metal oxides relative to their metal substrates. In addition, it is also used to etch silicon dioxide on silicon. As a dry etchant, hexafluoroethane has the advantages of extremely slight edge lateral erosion, high etching rate and high accuracy. It can well meet process requirements with small line widths and is widely used in semiconductor manufacturing processes.
R116 Refrigerant Parameters
| Name: R116, FC-116 | Chinese name: hexafluoroethane, electronic grade fluorocarbon, perfluoroethane, freon 116 |
| English full name: hexafluoroethane | Chemical molecular formula: CF3CF3, C2F6 |
| Molecular weight:138 | Standard boiling point: -78℃ |
| Critical temperature:20℃ | Critical pressure: 3MPa (absolute pressure) |
| Critical density: 0.613g/cm3 | CAS Number: 76-16-4 |
Application areas
Grouped by equipment type, for selection reference only; the equipment manufacturer's requirements and local regulations prevail.
Supply & Ordering
- Packaging
- cylinders / ton drums / ISO tanks / tankers (by grade and order size)
- Minimum order
- confirmed on enquiry; negotiable for bulk purchases
- Terms & lead time
- FOB / CIF / EXW and others confirmed on request
Please confirm the exact packaging, minimum order and lead time via the enquiry form below.
About WULA
WULA was founded in 2013. We are a refrigerant supply organizer, focused on moving goods from the production line to the customer's own line and site.
- Compliance paperwork
- We help customers meet compliance requirements: sales filing, per-transaction verification, quarterly reporting and three-year retention of documents.
- Order handling
- Scattered orders are managed through consolidated, data-driven administration to keep procurement efficient.
- Supply allocation
- Forecasting and coordinated allocation across multiple warehouses, to keep supply stable.
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R115 Refrigerant
